Abstract
Periodic nonlinearity which can result in error in nanometer scale has become a main problem limiting the absolute distance measurement accuracy. In order to eliminate this error, a new integrated interferometer with non-polarizing beam splitter is developed. This leads to disappearing of the frequency and/or polarization mixing. Furthermore, a strict requirement on the laser source polarization is highly reduced. By combining retro-reflector and angel prism, reference and measuring beams can be spatially separated, and therefore, their optical paths are not overlapped. So, the main cause of the periodic nonlinearity error, i.e., the frequency and/or polarization mixing and leakage of beam, is eliminated. Experimental results indicate that the periodic phase error is kept within 0.0018°.
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