Sub-micron period metal lattices fabricated by interfering ultraviolet femtosecond laser processing

Abstract

The interference pattern of a femtosecond laser has been utilized to fabricate nanostructures in the lattice. In this paper, SH (second-harmonic) waves (\(\lambda = 392.5\,{\text{nm}}\)) of a femtosecond laser were applied to four beams interfering laser processing using a demagnification system as a beam correlator. The lattice constant of the resultant matrix was shortened to 760 nm. The unit structures fabricated on gold thin films were nanoholes, nanobumps, nanodrops or nanowhiskers, and their unit size was minimized compared to the case with a greater lattice constant formed by fundamental wavelengths. The radius of a nanoball on top of a nanodrop was between 42 and 76 nm, and the radius of metallic hole arrays (MHA) was 220 nm. The energy efficiency of the laser increased by 4.79 times due to better absorption coefficient of gold at ultraviolet wavelengths. In addition, the smallest lattice constant was estimated with the use of a commercial plano-convex fused-silica lens and a NIR (near-infrared) achromatic lens.