Sub-Half-Micron Periodic Structures on Polymer Surfaces with Polarized Laser Irradiation

Abstract

A quarter-micron space-and-width linear periodic structures and an array of dot images are obtained with the Nd:YAG 4th harmonic laser irradiation on Kapton polyimide films, poly(ethylene terephthalate) films, spin-coated polyimide films and others. Our solid state Nd:YAG laser source is different from the excimer laser irradiation, in that it provides polarized beams without the need for a polarizer. Atomic force microscope (AFM) and scanning electron microscope (SEM) studies have been carried out. X-ray photoelectron spectroscopy (XPS) studies of laser-exposed areas indicate that no significant chemical reactions took place on exposed areas.