Sub-5 nm AFM Tip Characterizer Based on Multilayer Deposition Technology

Abstract

Atomic force microscope (AFM) is commonly used for three-dimensional characterization of the surface morphology of structures at nanoscale, but the “Inflation effect” of the tip is an important factor affecting the accuracy. A tip characterizer has the advantages of in situ measurement, higher accuracy of probe inversion results, and relatively simple fabrication process. In this paper, we developed a rectangular tip characterizer based on multilayer film deposition technology with protruding critical dimension parts and grooves parts. And the tip characterization is highly consistent across the line widths and grooves, and still performs well even in the sub-5 nm line width tip characterizer. This indicates that tip characterizers produced by this method can synergistically meet the combined requirements of standard rectangular structure, very small line edge roughness, very small geometry dimension, and traceable measurements.