Abstract
We have combined two high transmission planar x-ray waveguides glued onto each other in a crossed geometry to form an effective quasi-point source. From measurements of the far-field diffraction pattern, the phase and amplitude of the near-field distribution is retrieved using the error-reduction algorithm. In agreement with finite difference field simulations (forward calculation), the reconstructed exit wave intensity distribution (inverse calculation) exhibits a full width at half maximum (FWHM) below 15 nm in both dimensions. Finally, holographic imaging is successfully demonstrated for the crossed waveguide device by translation of a lithographic test structure through the waveguide beam.
Highlights
X-ray waveguides (WG) can be used to filter short wavelength radiation at nanoscale dimensions, replacing the function of macroscopic slits and pinholes used in conventional x-ray experiments
Depending on the materials employed for the guiding and cladding layers, waveguides are in principle capable to deliver beams with two-dimensional cross sections down to about d 10 nm [5], below the values currently achieved by focusing optics such as compound refractive lenses, mirrors and Fresnel zone plates [6, 7, 8]
At x-ray energies of 20 keV, even higher beam confinement in one dimension is demonstrated by multilayer mirrors [9] and at energies up to 10 keV sub-20 nm is demonstrated by Laue lenses [10] with an efficiency of ∼ 30%
Summary
X-ray waveguides (WG) can be used to filter short wavelength radiation at nanoscale dimensions, replacing the function of macroscopic slits and pinholes used in conventional x-ray experiments. An appropriate interlayer was placed between the guiding core and the high absorption cladding, resulting in significantly enhanced transmission This was demonstrated with planar one-dimensional waveguides (1DWG). In this work we have combined two high transmission 1DWG slices glued onto each other in a crossed geometry to form an effective two-dimensional quasi-point source for holographic imaging. Important advantages of this scheme are the compatibility with a wide range of thin layer deposition techniques, geometric parameters and material choices. In contrast to the previously reported serial arrangement of two crossed 1DWG [15], the present device is much more compact, so that the horizontal and vertical focal planes nearly coincide
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