SU-8-based Flexible Amperometric Device with IDA Electrodes to Regenerate Redox Species in Small Spaces

Abstract

A flexible sensor based on SU-8 photoresist was fabricated and its electrochemical performance was investigated using cyclic voltammetry. The device consisted of interdigitated array (IDA) electrodes on an SU-8 layer. It exhibited a clear electrochemical response during redox cycling of ferrocenemethanol at the IDA electrodes. Since the device was flexible, it could be inserted into a narrow bent space to monitor electrochemical responses. The observed electrochemical behavior was found to be consistent with that predicted by simulations based on redox compound diffusion.