Abstract
Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.
Highlights
Many technologies for particle detection in high-energy physics exist, covering different experimental needs depending on the nature of the measurement to be performed
A rough comparison of several detectors in these terms is given in Figure 1, which shows how technologies making use of microfabrication techniques derived from the semiconductor and MEMS industry, such as silicon pixels and strips, micropattern gas detectors and the recently introduced microfluidic scintillation detectors reach the best overall performance
We provide a summary of emergent detector technologies for particle physics based on SU-8 microstructures
Summary
Many technologies for particle detection in high-energy physics exist, covering different experimental needs depending on the nature of the measurement to be performed. A rough comparison of several detectors in these terms is given, which shows how technologies making use of microfabrication techniques derived from the semiconductor and MEMS industry, such as silicon pixels and strips, micropattern gas detectors and the recently introduced microfluidic scintillation detectors reach the best overall performance. It exhibits many properties that make it suitable for the microfabrication of particle detectors, such as the ability to be structured in a broad range of thicknesses and with high aspect ratios [2], excellent smoothness [3] and transparency [4] (desirable characteristics for the optical materials used in detectors such as scintillators), a relatively high dielectric strength [5] (desirable in devices making use of high electric fields, such as gaseous ionization detectors), and low outgassing [6] We review several particle detector technologies making use of microstructures obtained by SU-8 processing
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