Abstract
Using the transport of ions in matter program which is the TRIM program that based on a Monte Carlo simulation method to calculate the sputtering yield for polypropylene, that was bombed with (N2, O2, and Ar) ions of gas in ions energy range (0.1-300) Kev and for different angles. It can be seen from the results of this study the sputtering yield depends on the incident angle, ions energy, and atomic number of incident ions, surface binding energy of the elements that make up the polypropylene (pp) and the atomic number of the elements that make up the polypropylene. It is noted that the sputtering yield increases with increasing Incident ions angle (θ), and this increase is slight when the angle of incident ions angle is less than 600, and the sputtering yield increases clearly and quickly when the incident ions angle is from 600 to 800, and then decreases significantly when the angle is greater than 800. In addition, the sputtering yield increases significantly with the increase in the detonation ion energy until it reaches the highest value and then decreases with increasing energy, due to the amount of energy transferred from the detonating ion to the polymer atoms. We note the sputtering yield increase with increasing atomic number of ions (N2, O2, and Ar) that bombardment the polypropylene.
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