Abstract
In this paper, the I-V characteristic of a dc glow discharge are studied with the aim of determine the performance a good parametersfor stable operation of the plasma. Nitrogen plasma produced by dc glow discharge is the investigated with a manypurpose of studying plasma phenomena, the discharge system consists of two electrodes, the cathode forms various geometrical shapes and anode as a disc- shaped with diameter (8.8cm). The electrodes are enclosed in a large cylindrical glass chamber of pyrex filled with nitrogen gas. Two important physical parameters affecting the condition of the discharge are the gas pressure and constant inter-electrode distance. The discharge current-voltage (I-V) characteristic curves of the discharge were measured at variable pressure and the inter-electrode spacing, Current-voltage characteristics visualization of the discharge indicate that the discharge is take place in the normal glow region. The (I-V) characteristics of nitrogen gas discharge were deduced as a plasma system operated in normal glow discharge nitrogen, which is very important parameter in the sputtering and deposition. Also, the discharge current is increased for nitrogen plasma discharge with the increasing of the working pressure lead to increase the deposition rate.DIO.: http://dx.doi.org/10.31257/2018/JKP/2019/110110
Highlights
The research into the conditions of the dc glow discharge is of largeinterest, where DC glow discharges are applied more general for depositing thin films, plasma polymerization, etching, oxidation, and pumping gas discharge lasers, etc. [1]The low-pressure glow discharge plasma is generating by applying a potential difference between two electrodes
The present work aims to study the effects of both pressure and cathode geometry, on the glow shape, characteristics I-V, as well as on the luminous intensity emitted from the positive column of nitrogen glow discharge plasma (NGDP)
The electrical characteristics of discharge plasma, like dependency of discharge current on the applied voltage and gas pressure inside the vacuum, are of importance to introduce the homogeneity of the generated plasma
Summary
The research into the conditions of the dc glow discharge is of largeinterest, where DC glow discharges are applied more general for depositing thin films, plasma polymerization, etching, oxidation, and pumping gas discharge lasers, etc. [1]. The low-pressure glow discharge plasma is generating by applying a potential difference between two electrodes. The radiation is the result of ion or electron interaction with others particles in the plasma. Different studies took advantage of various DC glow dischargestrategiesand configurations for plasma treatment of polymer surfaces for different applicationsHino et al [7] made use of a dc glow discharge that make use of a biased cylindrical hollow copper anode for the treatment of silicone rubber deposited on an. The present work aims to study the effects of both pressure and cathode geometry (diameter and depth of hollow cathode) , on the glow shape, characteristics I-V , as well as on the luminous intensity emitted from the positive column of nitrogen glow discharge plasma (NGDP)
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