Abstract

The results showed that the silicon nanoslit array exhibits strong transmission peaks at the visible wavelength. The peak positions can be tuned by changing the slit period. It was found that the peak transmission increases with decreasing period. It was also demonstrated that the transmission spectrum of the nanoslit array can be used to distinguish between different slit periods. In this study provides a fundamental understanding of the transmission spectra of silicon nanoslit array at visible wavelength. The results can be used to design and optimize optical devices based on nanoslit array.

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