Study on UV nanosecond laser pulse machining techniques of photosensitive glass

Abstract

ABSTRACT With the doping of Ag + and Ce 3+ , the FOTURAN photosensitive glass shows not only the normal optical property but also some characteristics of metal. The photosensitive glass has been widely used in optical field for its own advantages. It is sensitive to UV light. In this paper an UV nanosecond pulse laser micro-machining system is designed and successfully performs the micro-structure machining on the FOTURAN photosensitive glass. Based on the increasing requirement in photosensitive glass shape-control fabrication, different system parameters have been tested to achieve shape-control fabrication and some satisfi ed microstructures are achieved finally. Keywords : photosensitive glass, FOTURAN, mi cro-machining, nanosecond pulse laser, shape-control fabrication 1. INTRODUCTION The FOTURAN photosensitive glass is different from common optical glass with the doping of Ag + and Ce 3+ . So they show not only the normal property but also some characteristics of metal. The photosensitive glass has been widely used in optical field, for example machining micro-lens and directly fabricating circuit board, by its own advantages. The advantages of short pulse lasers, for example nanosecond lasers, are very promising for their future applications in precise material processing. As a result of wide applications in the optical material, there are considerable interests in the micromachining on photosensitive glass surf ace by nanosecond pulse laser. To achieve the precise figuring it is necessary to investigate the interaction between pulse laser and material processed. In this paper an UV nanosecond pulse laser micro-machining system is designed because the FOTURAN phot osensitive glass is sensitive to ultraviolet light. To get the appropriate machining parameters a large number of experiments were done and the results were analyzed.