Abstract
The conventional machining method for silicon nitride ceramics has low machining efficiency, prone to cracking, chipping and other defects. In this paper, the author carried out a study on the influence of ultrasonic vibration grinding on surface quality of silicon nitride ceramic, and carried out ultrasonic vibration grinding process test for silicon nitride ceramic and conducted the analysis of influence of this machining process on surface quality with orthogonal test. The test results showed that the influence on surface roughness decreased in the order of spindle speed, feed rate, cutting depth, and amplitude of vibration.
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