Abstract
Considering that in the nanometer grating deposition the substrate is usually set at the center of the laser beam, the straight edge diffraction occurs. Therefore this paper analyze the straight edge diffraction effect of base model Gaussian laser field, which based on the straight edge Fresnel diffraction effects, using the theory of scalar optical, considering the situation of the actual beam waist and straight edge diffraction side not at the same position, and obtain a general and practical light intensity expression of the base model Gaussian laser under the straight edge diffraction field, and had some model analysis and simulation of its light intensity distribution characteristics.
Published Version
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