Abstract
Porous silicon has been widely studied due to its high explosion characteristics, less harm to the environment and compatibility with all silicon based production processes. At present, it has been used in military, national defense and other fields. In this paper, porous silicon was prepared by electrochemical anodic oxidation. The electrolysis time was 35 min, the current density was 50 mA/cm2, and the electrolyte was HF: DMAC=5:1 (volume ratio). The effects of silane coupling agents (KH550 and KH560) and cathodic reduction treatment on the life of porous silicon were investigated. The results show that the life of porous silicon chips treated by cathodic reduction+KH560 is longer, and the morphology of porous silicon chips treated by cathodic reduction+KH560 is better.
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