Study on the Resin Layer Formation According to the Imprinting Pressure Rates

Abstract

The UV imprinting period and pressure magnitude are very important processing factors along with pattern shape and density of mold pattern. In the control process of the residual resin layer, the imprinting period and the magnitude and rate of the imprinting pressure should be properly assigned according to the density and shape of the mold pattern as well as resin viscosity etc. In this work, the imprinting time and pressure rate are studied for the formation and thickness variation of the residual resin layer. The thickness variation of the resin layer during imprinting process is computed according to the variation of the imprinting load rate, and some comparison results are successfully obtained with a 3-D shape of the mold patterns.