Abstract
Diamond-like carbon (DLC) films were deposited on the surface of silver nanoparticles (NPs) using two different sets of technology parameters by radio-frequency magnetron arc plasma enhanced chemical vapor deposition (PECVD) in this paper. The probe profilometer, SEM, AFM, Raman spectroscopy, XPS and UV–vis spectrophotometer were used to characterize the film thickness, microstructure, composition and sensing performance. Results showed that the basic vacuum degree had a greater influence on the properties of DLC films than that of RF forward power. The LSPR interface prepared in short time had sensing performance, but the sensitivity decreased with the thickness of DLC films increase. DLC films of higher sp3 bonds content can slow down the decline rate of the sensitivity caused by increasing of the film thickness.
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