Abstract

A Tungsten–Titanium (W–Ti) diffusion barrier was prepared on an iron (Fe) substrate by means of magnetron sputtering with subsequent annealing at different temperatures. Rutherford Backscattering Spectrometry (RBS) was used to analyze the Fe distribution in the W–Ti layer. The diffusion constant D0=3.4×10−16m2/s and the activation energy Q=43kJ/mol of the Fe diffusing in the W–Ti layer were subsequently calculated based on Fick’s Second Law. The results demonstrated that a 291nm-thick W–Ti barrier layer can be used to block Fe from diffusing into a CIGS solar cell for 20years at a work temperature of 308K (35°C).

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