Study on the optical properties of Iridium-coated lobster eye X-ray micro pore optics

Abstract

Lobster eye micro pore optics (MPO) has been extensively researched, developed, and experimented over the past few decades since Angel proposed it in 1979. The inner wall of the square channel was coated with high-density Iridium metal, which is used to improve X-ray reflectivity, an essential feature of lobster-eye X-ray optics. In this work, we successfully used atomic layer deposition technology (ALD) to coat a 21 ± 1 nm thick iridium metal film. We used SEM, AFM, EDS, ZYGO interferometer, and X-ray technology to investigate the optical properties of Iridium-coated lobster eye optics. Initially, we discovered that the roughness of the inner wall and spherical surface of the device would worsen due to the high deposition temperature. At the voltage was 5 kV, the current was 0.1 mA. The X-ray test results reveal that when the deposition temperature reached 395 °C, the angular resolution dropped nearly 12.5%, and the X-ray effective area was reduced by about 25%.