Study on the method of eliminating stray light and uniform light micro-illumination based on microlens array matching DMD

Abstract

The parallel confocal micro-measurement method based on DMD with structured light illumination has high imaging speed and can measure quickly in a wide range. However, the traditional micro-illumination technology has uneven illumination light and stray light, which affects the measurement accuracy. Therefore, based on the parallel confocal micro-imaging system of DMD structured light illumination, a micro-illumination method of eliminating stray light and uniformly illuminating is proposed in this paper, which uses microlens array to match DMD array. The simulation results show that using microlens array can improve the uniformity of micro-illumination and the utilization rate of light energy. The experimental results show that the CV value of the micro-illumination system based on microlens array is 1.47%, which is about 20 times higher than that of the traditional illumination system. The uniform light illumination system with microlens array adopts modular design, which is easy to transplant and can be applied to ordinary microscopes to improve the microscopic imaging quality.