Abstract
In order to obtain good TaN film transducer and reduce its ignition voltage, the influence of the setting position and cooling method of the heat treatment process on the TaN film transducer were compared and analyzed. By measuring the square resistivity, SEM and XRD, the performance of the film before and after heat treatment were characterized. The ignition voltage of the TaN film transducer was tested, and the results showed that the ignition voltage of the heat-treated TaN film transducer could be reduced a lot. It provided a technical way for the micro-energy of MEMS pyrotechnics.
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