Study on the Hydrophobic Modification of MTES/NH3 Vapor Surface Treatment for SiO2 Broadband Anti-Reflection Coating.

Qianyang Fan,Lianghong Yan,Bo Jiang,Hanxi Liu,Xinli Jia

doi:10.3390/ma15030912

Qianyang Fan, Lianghong Yan + Show 3 more

Open Access

https://doi.org/10.3390/ma15030912

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Abstract

In this article, ammonia and methyltriethoxysilane (MTES) were chosen as vapor phase modifiers for the base-catalyzed SiO2 film. The surface of the film became more dense because of the hydroxyl condensation under the catalyst of ammonia, while the introduction of methyl groups by MTES of vapor treatment hindered the condensation to avoid over-change in film thickness. The hydrophobic of film was improved while the surface roughness of the film increased after treatment. The treated double-layer broadband anti-reflection (AR) coating retains high optical properties with the transmittance of 99.61%, 98.85%, and 99.16% at 355 nm, 532 nm, and 1064 nm, respectively. After exposing to the high humidity condition for 30 days, the broadband AR coating after treatment shows good optical durability, and the transmittance at 355 nm only drops by 0.12%. This vapor surface treatment can find potential application in high-power laser systems and solar cells.

Highlights

Surface Treatment for SiO2 BroadbandAnti-reflection coating is usually applied to the surface of optical devices to reduce the energy loss caused by light reflecting [1]
Many methods have been exploited for the preparation of AR coatings such as phase separation, etching, physical vapor deposition, and the sol–gel method [2,3,4,5,6]
The AR coating tends to absorb moisture and contaminants in the surrounding owing to the considerable hydroxyl groups on the surface of the coating [8]

Summary

Introduction

Anti-reflection coating is usually applied to the surface of optical devices to reduce the energy loss caused by light reflecting [1]. Many methods have been exploited for the preparation of AR coatings such as phase separation, etching, physical vapor deposition, and the sol–gel method [2,3,4,5,6]. Among these methods, the sol–gel method is widely used due to its mild preparation conditions, simple operation process, and low cost. A sol–gelderived silica AR coating can effectively reduce the loss of light energy with high laser damage threshold (LIDT) [7]. Improvement of the stability of the AR coating is a key factor for the practical application of the coating

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Results

Conclusion