Study on the characteristics of multilayer dielectric grating mask profile by the RCW method

Abstract

The fabrication of multilayer dielectric gratings was theoretically and experimentally investigated. The RCW (rigorous coupled-wave) method was adopted to theoretically analyze the influence, which is caused by the gratings profile and multilayer dielectric stack, on the diffraction efficiency. Researches on detecting principle and methods of the multilayer dielectric gratings were also tried to be carried out here. The spectral distributing of the zero order diffraction efficiency was used to judge the gratings profile, basing on the theoretical research and the calculating results by the RCW method. Detecting experiments have been conducted to compare the theoretical analyses; the results of this comparison may be helpful to instruct the detection of the gratings profile.