Abstract

Based on semiclassical theory, a model of the interaction between neutral atoms and the laser standing wave field has been established in this article. The trajectories and the deposition characteristics are analyzed with channel effect, and the full width at half maximum of nano-grating is 96.70, 0.532 and 12.16 nm when the divergence angle, spherical and chromatic aberration are discussed, respectively. The simulation results show that the contrast of the stripes decreases with the increasing divergence angle of the atomic beam. Also, the contrasts of the stripe are 85.2:1 and 5.33:1 when the divergence angles equal 0.1 and 0.3 mrad. Owing to the scission of the stripe, the quality of the deposition deteriorates with a divergence angle over 0.5 mrad.

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