Abstract
The distance of air gap is much larger than the mean free path of gas molecules for MEMS devices with small vibration. The nonlinear Reynolds equation can be transformed into linear Reynolds Eq. based on this condition and under certain assumptions. Then the mathematical model of damping of the movable armature is established with the linear Renault equation. The damping characteristics of the movable armature are studied based on the damping force mathematical model. The relation of damping coefficient and the dimensions of movable armature, the dimensions of air gap are analyzed. The research in this paper provides references for the design and analysis of the damping coefficient of the MEMS devices with small vibration.
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