Abstract
In this paper, we have numerically estimated the temperature sensitivity of silicon 2×2 multi-mode interference (MMI) coupler having silicon nitride as an upper cladding layer. The effect of refractive index and stress introduced by the cladding layer has been investigated using two MMI couplers having two different power splitting ratio. Moreover, the effect of sidewall slope angle of the waveguide in terms of its stress, birefringence and temperature sensitivity is also investigated numerically. The temperature sensitivity in terms of power splitting ratio for cladding thickness varying from 300 nm to 800 nm has been investigated in this paper. The results show that the stress induced by the cladding layer changes the temperature sensitivity of the MMI coupler in a very different way compared to the case when stress is not considered. Moreover, from the results it is found that the MMI couplers behave in similar fashion when the cladding layer thickness is beyond 500 nm.
Published Version
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