Study on surface roughness evolvement of Nd-doped phosphate glass after IBF

Abstract

Nd doped phosphate glass is widely used as gain media in high power laser system. It is traditionally polished with the annular polishing technology. The edge effect is inevitable in annular polishing process and it results in the low manufacturing efficiency. Ion Beam Figuring (IBF) is a highly deterministic, non-contact method for the ultra-precision optics fabrication. So the edge effect is avoided. Nanometer and sub-nanometer precision is realizable in IBF. In this paper, Nd doped phosphate glass was polished with IBF, and the evolvement of surface roughness was emphasized. The roughness of surface polished with ion beam at normal and oblique incidence was researched. The oblique incident angle was 45°. The surface roughness was measured with the white light interferometer. No evident change was observed. This means that the pre-finish roughness can be preserved in IBF. The results denote that IBF is a feasible method to correct the contour errors of Nd doped phosphate glass, and the roughness will not be coarsened.