Study on structural properties of epitaxial silicon films on annealed double layer porous silicon

Abstract

In this paper, epitaxial silicon films were grown on annealed double layer porous silicon by LPCVD. The evolvement of the double layer porous silicon before and after thermal annealing was investigated by scanning electron microscope. X-ray diffraction and Raman spectroscopy were used to investigate the structural properties of the epitaxial silicon thin films grown at different temperature and different pressure. The results show that the surface of the low-porosity layer becomes smooth and there are just few silicon-bridges connecting the porous layer and the substrate wafer. The qualities of the epitaxial silicon thin films become better along with increasing deposition temperature. All of the Raman peaks of silicon films with different deposition pressure are situated at 521cm−1 under the deposition temperature of 1100°C, and the Raman intensity of the silicon film deposited at 100Pa is much closer to that of the monocrystalline silicon wafer. The epitaxial silicon films are all (400)-oriented and (400) peak of silicon film deposited at 100Pa is more symmetric.