Abstract
Demagnified rotation-free image formed by combined immersion magneto-electrostatic lenses is beneficial for projection lithography systems with respect to pattern stitching. Based on Busch theorem, the image-rotation in combined immersion magnetic electrostatic lenses is investigated, and consequently this image-rotation free condition is derived. A practical lens based upon this condition is constructed by parametrically optimizing its magnetic field. The numerically computed results show that its image-rotation-angle for this system is close to zero.
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