Study on QCM Mass Sensitivity for Different Electrode Structures

Abstract

This paper describes quartz crystal microbalance (QCM) and QCM mass sensitivity for different electrode structures. Mass sensitivity is a key parameter for QCM in practical application, because the higher and the more uniform the mass sensitivity, then the higher the accuracy of the QCM detection. The research showed that the mass sensitivity of QCM is affected by a series of factors, but the electrode structure is one of the most important factors. Through the combination of Sauerbrey theory and Bessel theory, we get the mass sensitivity curve of QCM with different electrode structures in theory. The results of computer simulation are consistent with the theory calculation. At last, we designed the electrode structures of different shapes and obtained the corresponding mass sensitivity curves. The results show that the mass sensitivity distribution of the double-ring electrode structure is more uniform and consistent.