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Abstract
A new precision rotary piezoelectric (PZT) actuator is proposed to improve its drive performance. Based on piezoelectric technology, the actuator adopts the principle of bionics, with a new method of stator inner anchor/loosen/rotor outer drive and a distortion structure of a thin shelf flexible hinge. This structure improves the stability of the anchor/loosen and step rotary. Its characteristics are evaluated by finite element analysis. The experiment shows that the new rotary PZT actuator works with higher frequency (40 Hz), higher speed (325 μrad/s), wider movement (360°), high resolution (1 μrad/step) and high torque (30 N·cm). The novel actuator can be applied in wide movement and high resolution driving devices such as those for optics engineering, precision positioning and some other micro-manipulation fields.
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