Abstract

The white-light interferometry (WLI) has been widely used in 3D topography measurement. This paper introduces a white light phase shifting method for interferometry with the combination of Hariharan phase shifting and WLI. A micro/nanolevel mechanic system was designed and built for the experiments. To verify system accuracy and feasibility, a 100nm step height standard was measured by the designed system and the metrological nanomeasurement machine (NMM). Results of 102.7nm and 102.5nm are obtained respectively. En value of 0.14 is calculated, demonstrating the reliability of result measured by the system. Based on classic nanoquantity traceability system, the measurement results can effectively traced back to the definition of nanometer magnitude, which can improve the accuracy of measurement.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.