Abstract
A series of Ti1-xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure and surface morphology of the coatings were characterized by energy dispersive spectroscopy (EDS), X-ray diffraction (XRD) and scanning electron microscopy (SEM). The effect of Al content on the microstructure and the oxidation resistance was studied. It was found that Ti1-xAlxN compound coating exhibits a cubic structure with (1 1 1) preferred orientations. The oxidation resistance obviously improves with the increase of Al content.
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