Abstract
A set of ultrathin aluminum films (2-16nm) were deposited by molecular beam epitaxy technique. Their thickness dependence of optical properties were studied by a GES5 spectroscopic ellipsometer. The ellipsometry data were fit by using Drude and Lorenz model. Fitting results show that optical index of ultrathin aluminum films depend on the film thickness. But aluminum films with thickness of 2-3nm show different optical properties from other films.
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