Study on optical anisotropy properties of SiO2 films with different thermal annealing temperatures

Abstract

SiO2 films are deposited on Si substrates by an ion beam sputtering technique and continuously annealed in a quartz culture dish in air at various annealing temperature ranging from 20 to 750 oC with a step of 100 oC for a fixed time of 24 h. The effects of thermal treatment on optical anisotropy properties of SiO2 films are investigated by spectroscopic ellipsometry. When the annealing temperature is 550 oC, the optical anisotropy properties of SiO2 film is minimum. The obtained results indicate that the optical anisotropy properties of SiO2 films can be improved by a proper thermal annealing process.