Abstract
The VAMAS Project (Versailles Project on Advanced Materials and Standards) was set up at the Economic Summit of Versailles in June 1982. A number of technical working parties have been organized. The VAMAS-SCA (Surface Chemical Analysis) working group-Japan is one of them, and has been active since 1985.We have established the reliability of the quantitative analysis with AES using Au-Cu alloys as round robin specimens, and we have published the results elsewhere. As the next objective of VAMAS-SCA-JAPAN, we adopted the project on the improvement of the reliability of the quantitative analysis with XPS, To carry out this project, we decided to use Au-Cu alloys as round robin specimensTo determine the measurement conditions, the effects of the followings on the quantitative analysis were investigated : (1) sputtering conditions, (2) X-ray source, (3) focus of analyzer, (4) angular dependence, (5) pass energy and (6) energy step of measurement. We found the measurement conditions that all participants in the round robin test could adopt.
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