Abstract
As an application of superconductors, we propose a magnetically levitated conveying system for clean rooms or vacuum chambers of semiconductor manufacturing industry. By using the pinning effect of superconductors, it is possible to make a stable levitation system without any mechanical contacts. This system consists of a levitated conveyer and a pair of magnetic rails. Considering a practical use of magnetically levitated conveying system, it is necessary to change levitation forces and stiffness. In this paper, we tried to apply pulsed-field magnetization (PFM) to improve the system. Moreover, dynamic characteristics of the levitated system are discussed to verify the effect of PFM for the system.
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