Study on LCD Micro Stereolithography using Silver Particles Photosensitive Resin

Abstract

In order to apply the LCD micro stereolithography to the fabrication of electric devices, we developed silver particles photosensitive resins, which were made by mixing micro-sized silver particles into an acrylic photosensitive resin. In this report, 3D microelectrode with high electrical conductivity was typically fabricated as a test piece. Electrical conductivity was then examined as a function of silver mixing rates by the use of four-terminal micro resistance patterns before and after heat treatment under the condition of 200±10°C for 1hour. After the heat treatment, micro resistance patterns with silver mixing rates of 50wt% showed a low electrical resistance less than 3×10-5Ω·cm. Our results indicated that the electrical conductivity was improved with an increase of conductive path equivalent to the mixing rate of silver particles. Consequently, 100 numbers of microelectrodes with the high electrical conductivity were able to fabricate in the high speed of 1.3second by using the LCD mask designed with four grayscale levels of 255, 170, 130 and 80. Also, the good fabrication accuracy could be accomplished within the error rate of 2.8% or 1.4% in height or width after the heat treatment.