Abstract
The paper introduces a new method, integral summation algorithm, to measure superfine scale based on Fraunhofer Diffraction. Be different from the traditional method, the paper simulates a series of curve of diffraction luminance distribution on different given size based on Fraunhofer Diffraction theory and researches the closest one to the diffraction curve of unknown slot measured. In order to get more accurate measurement result, the curve is taken by the integral summation algorithm and be compared on the integration area difference instead of comparing the standard deviation. The result shows that the size of given slot is closer to the size of unknown slot than standard deviation method, which somewhat improves the accuracy of the measurement.
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