Study on fractal and island growth processes of thin films with a modified DLA model

Abstract

A modified diffusion-limited aggregation (DLA) model for two-dimensional (2D), three-dimensional (3D) fractal growth and 3D island growth was established based on the DLA model in this paper. The number of particles [Formula: see text] and the size of the box size [Formula: see text] (related to side length [Formula: see text]), which are related to film thickness, are considered in the study. The simulation results are a good reflection of the actual experimental results. The results show that the particle number and simulation box size can affect the fractal morphology and fractal dimension of the film, and also the 2D to 3D transformation. In addition, the critical particle number [Formula: see text] and the critical box size [Formula: see text] during the transformation process are also given.