Study on fast linear scanning for a new laser scanner

Abstract

In the field of lidar system design, there is a need for laser scanners that offer fast linear scanning, are small size and have small a rotational inertia moment. Currently, laser scanners do not meet the above needs. A new laser scanner based on two amplified piezoelectric actuators is designed in this paper. The laser scanner has small size, high mechanical resonance frequencies and a small rotational inertia moment. The size of the mirror is 20 mm×15 mm. To achieve fast linear scanning performance, an open-loop controller is designed to compensate the hysteresis behavior and to restrain oscillations that are caused by the mechanical resonances of the scanner's mechanical structure. By comparing measured scanning waveforms, nonlinearities and scan line images between the uncontrolled and controlled scanner, it was found that the scanning linearity of linear scanning was improved The open-loop controlled laser scanner realizes linear scanning at 250 Hz with optical scan angle of ±12 mrad.