Abstract
Electronic excitation temperature is an important indicator of the spectrometer excitation source. This work experimented self-made micro-ICP excitation spectroscopy based on PCB technology, and detected 17 spectral lines in 690~860 nm of argon atom. 763.51 nm and 772.42 nm spectral lines whose wavelengths are close to were used to calculate electronic excitation temperature of argon excited by micro-ICP, and results show in 1600~3000 K. Experimental test data shows effects of argon gas pressure on electronic excitation temperature that in 20~210 Pa electronic excitation temperature increases with pressure on the whole. When argon pressure is greater than 220 Pa, plasma flame flickers and the electronic excitation temperature shows greater fluctuation; Experimental test shows effects of RF power on electronic excitation temperature that in 3~23 W electronic excitation temperature gradually increases with RF power. Causes of electronic excitation temperature with pressure, RF power variation are analyzed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.