Abstract
Step gauge is the most typical multiple target standard of plane distance with a wide range of applications. The calibration of step gauge is, however, difficult because of its unique structure. In this paper, a new method for measuring plane distance is presented. The principle of light-section microscope is used in accurate positioning of the planes being measured. Then the optical interferometry techniques are used to realize continuous dynamic measurement of the plane distance. Based on this method, a novel optical probe is built and installed on a laser interferometer for length measurements. A series of experiments were carried out for determining the accuracy of positioning the optical probe and repeatability of the measuring system. Experimental results show that measurement repeatability is better than 16 nm, and measurement uncertainty (k=2) is less than 0.03 μm + 1.0×10-6L, for a total length of L being measured in micrometers.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
