Study on Dynamic Characterization and Vibration Reduction of Scrubber Structures Using Fluid Structure Interaction Analysis

Abstract

A scrubber is an important structure in post-semiconductor processes. It is impossible to completely modify the entire structure of an already installed and operating scrubber if a vibration problem occurs. Therefore, it is essential to determine the cause of vibrations and reinforce the structure. Vibration is majorly caused by the pump, and as considerable vibration is generated around the pump, it is essential to analyze it. However, as various equipment is operated in buildings where scrubbers are installed, the vibration data measured by attaching sensors are invalid owing to surrounding problems. Therefore, in this study, vibration data on the periphery of a pump according to the pump driving force was confirmed using a two-way fluid structure interaction analysis. To this end, a case run was conducted within a changeable design range, and an efficient design for vibration reduction was suggested by comparing the data with a change in the design factor.