Abstract
AbstractIn this paper, flow visualization of the oblique shock waves of a single‐crystal silicon microscale supersonic wind tunnel is described. The microscale supersonic wind tunnel has a convergent–divergent section and a throat area of 1000 μm × 300 μm, and designed for realizing supersonic flow of Mach 2 in microscale domain. The schlieren system with integrated optical microscope was used for visualization of the oblique shock waves generated in the microscale domain. To investigate the effect of nonisentropic flow state on the inclination angle to the shock, a numerical integration of the modified Shapiro's differential equation was applied.
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