Abstract

I. INTRODUCTIONFerromagnetic resonance (FMR) measurement technique is well known to be one of the important methods to evaluate the dynamic magnetic properties such as the effective saturation magnetization, damping constant, and so on, of magnetic thin film materials [1]. Recently, a broadband FMR (B-FMR) measurement technique with a coplanar waveguide (CPW) and a vector network analyzer (VNA) has been widely used to investigate them [2]-[4]. The reason for this is that the films are excited in a very wide range of RF frequency changing external magnetic field intensity and its high sensitivity allows for downsizing of the samples to the micro-scale, which provide detailed information on very thin films subjected to practical use under a variety of circumstances.In general, for FMR measurement technique, it is pointed out that the non-uniform magnetization precession mode occurs by the applied direction of external magnetic field. However, for the B-FMR measurement technique, this problem still remains an open question. Herein, we chose Fe-M binary alloys as magnetic thin film materials, investigated the in-plane and out-of-plane dynamic magnetic properties of Fe-M binary alloy thin films using the B-FMR measurement technique, and further discussed the difference between these properties in their films by the applied direction of external magnetic field in detail.II. EXPERIMENTAL PROCEDURES10-nm thick Fe-M (M=Ni, Si, Co, and Ga) binary alloy thin films were fabricated by DC magnetron sputtering onto glass substrates. These film compositions were determined by energy dispersive x-ray spectroscopy (EDX), while the crystallographic structure of these films was performed using the high-angle XRD analysis and TEM observation, indicating that all film structures are polycrystalline and bcc phase.As for the dynamic magnetic properties of these films, the in-plane and out-of-plane effective saturation magnetization (4πMs,eff, //, 4πMs,eff,⊥) and the in-plane and out-of-plane effective damping constants (α//, α⊥) were evaluated by the B-FMR measurement technique. The external magnetic field was applied parallel to the CPW plane and swept between -0.01–0.3 T at various resonance frequencies. On the other hand, 4πMs,eff,⊥ and α⊥ of the films were determined in an external magnetic field applied perpendicular to the CPW plane swept between 1.4–3.3 T at various resonance frequencies. These measurements were performed at room temperature. The other magnetic properties of these films were already described in [4], [5] in detail.III. RESULTS AND DISCUSSION4πMs,eff, //, 4πMs,eff,⊥, α//, and α⊥ of 10-nm thick Fe-M (M=Ni, Si, Co, and Ga) thin films are summarized in Table 1 and 2. As be noticed in Table 1, 4πMs,eff, // values of these films became higher or lower than those of saturation magnetization (4pMs) evaluated by VSM, which might be attributed to the appearance of negative or positive surface anisotropy. On the other hand, 4pMs,eff,⊥ of these films almost agreed with those of 4πMs evaluated by VSM, meaning that the easy magnetization direction of every film is in the film plane.As for the effective damping constant (Table 2), in case of M=Ni, α// value was almost equal to that of α⊥, indicating that the intrinsic damping can be obtained regardless of the external magnetic field direction. On the other hand, in case of M=Si, Co, and Ga, these damping depend on the external field direction, and these α// values were higher than those of α⊥. The reason for these differences might be that the non-uniform magnetization precession mode appears by magnetic inhomogeneities such as the two-magnon scattering, the anisotropy dispersion, and so on when the external magnetic field is applied in the film plane. On the basis of these results, it is suggested that the external magnetic field direction must be seriously selected by the kind of magnetic materials as their effective damping constants are evaluated by the B-FMR measurement technique.ACKNOWLEDGEMENTThe authors thank Prof. Satoshi Okamoto, and Associate Prof. Nobuaki Kikuchi at Tohoku University for performing the photo lithography and measuring XRD diffraction patterns.This work was supported in part by KAKENHI (JP17H03226) from MEXT, Japan. This work was supported in part by CSIS, CSRN, and CIES, Tohoku University. This work was also supported in part by the ASRC in Japan. **

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