Study on Characteristics of Electromagnetic Coil Used in MEMS Safety and Arming Device.

Yi Sun,Wenzhong Lou,Yuecen Zhao,Hengzhen Feng

doi:10.3390/mi11080749

Abstract

Traditional silicon-based micro-electro-mechanical system (MEMS) safety and arming devices, such as electro-thermal and electrostatically driven MEMS safety and arming devices, experience problems of high insecurity and require high voltage drive. For the current electromagnetic drive mode, the electromagnetic drive device is too large to be integrated. In order to address this problem, we present a new micro electromagnetically driven MEMS safety and arming device, in which the electromagnetic coil is small in size, with a large electromagnetic force. We firstly designed and calculated the geometric structure of the electromagnetic coil, and analyzed the model using COMSOL multiphysics field simulation software. The resulting error between the theoretical calculation and the simulation of the mechanical and electrical properties of the electromagnetic coil was less than 2% under the same size. We then carried out a parametric simulation of the electromagnetic coil, and combined it with the actual processing capacity to obtain the optimized structure of the electromagnetic coil. Finally, the electromagnetic coil was processed by deep silicon etching and the MEMS casting process. The actual electromagnetic force of the electromagnetic coil was measured on a micro-mechanical test system, compared with the simulation, and the comparison results were analyzed.

Highlights

As one of the key components of ammunition, the miniaturization and intelligence of the fuse is of great significance for weapon systems
We presented an electromagnetically driven mechanical systems (MEMS) safety and arming device that was small in size, low in power consumption, and in line with the idea of integrated design
As an important driving component of the MEMS safety and arming device, the electromagnetic coil was small in size and precise in structure

Summary

Introduction

As one of the key components of ammunition, the miniaturization and intelligence of the fuse is of great significance for weapon systems. The micro-electro-mechanical systems (MEMS) safety and arming device has been studied due to its small size, light-weight, and high anti-overload capabilities. The U.S Army Armament Research, Development and Engineering Center has conducted research on MEMS fuse technology and produced smaller, safer, and less expensive safety and arming devices than ever before [7,8,9,10,11]. The first way is the ‘lithographie, galvanoformung, abformung’ (LIGA) method, which is based on metal substrates [12,13,14,15]. In this method, a MEMS metal spring and slide are needed, and the structures are set perpendicular to each other to form an interlocking mechanism

Methods

Findings

Discussion

Conclusion