Abstract

AbstractIn this study, we developed a technique for modifying the surface of the silicone elastomer Poly(dimethylsiloxane) (PDMS) by 172‐nm wavelength vacuum ultraviolet (VUV) light exposure. Such materials have high potential for application to micro/nanofluidic devices if their surface properties can be adequately controlled. The hydrophilicity, zeta potential and bonding strength of the VUV‐exposed surfaces were investigated and compared to surfaces exposed to conventional vacuum oxygen plasma. It was found that the proposed technique was effective at modifying the surface conditions from hydrophobic to hydrophilic, increasing the zeta potential, and allowing good bonding to glass. The time required to produce the maximum bonding strength was found to be similar to that for vacuum oxygen plasma exposure. However, since VUV exposure does not require the creation of a vacuum, it offers a faster turnaround, making it suitable for mass production. Copyright © 2010 John Wiley & Sons, Ltd.

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