Abstract
A xenon discharge for 147 nm vacuum ultraviolet (VUV) emission was studied. The discharge was enclosed in a tube of diameter 12 mm with length of 40 mm, which was excited by RF electrodeless discharge (120 MHz). At one end of the tube, an MgF2 monocrystal disc is sealed as a VUV output window. Its axial VUV radiance is experimentally measured by a pre-calibrated VUV spectral detecting system at various xenon pressures. Its VUV output characteristics are also theoretically studied using a computational model with 10 atomic levels. It is found that the maximum axial VUV radiance (about 8.9 W Sr-1 m-2, i.e. 6.6 × 1018 photons Sr-1 m-2 s-1) was reached at a xenon pressure of about 40 Pa. The theoretical and experimental results are compared. The column VUV efficiency is estimated to be 42%.
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