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Abstract
In this paper, the films of lead zirconate-titanate formed by the method of high-frequency reactive plasma sputtering in oxygen are studied. The films have a thickness of 610–660 nm and a developed relief with a predominant number of protrusions with a height of 100–300 nm. It is shown by the methods of X-ray phase analysis and piezoelectric force microscopy that the PZT crystallites are located on the surface of the protrusions. The piezoelectric strain coefficient value is 2,73+0,44 pm/V. The formed PZT films can be used in 3D elements of nanopiezotronics (memory elements, sensors of mechanical influences, energy harvesters).
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