Abstract
The results of a systematic study of the roughness of LiF deposits and of Ag upon these LiF underlayers are provided. The rms roughness σ and the autocovariance length σ of various LiF and Ag/LiF films are determined. The dependence of δ and σ on the film thickness is carefully investigated. It is shown that LiF is a poor underlayer compared with CaF 2 and that silver films reliably replicate the LiF surfaces.
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